Plasma and Semiconductor Science for Chips (PS4C)

Joint International Master between Ruhr University Bochum, Technical University Eindhoven, and University Osaka under development.

Goal

Nano- and microengineering for future chip development is a key technology, supporting computation, communication, data storage, sensing, and the rapid growth of data-intensive and AI-based applications. Its strategic importance is recognised globally through initiatives such as the Chips Acts in Europe, the United States, and Japan, as well as national high-tech agendas. The success of future chip technologies (microelectronics, photonics, quantum, sensors etc.) relies heavily on advanced manufacturing technologies, particularly plasma-based processes, which are used in nearly half of all chip fabrication steps. As semiconductor technologies advance, plasma processing has become indispensable for critical manufacturing steps. If the EU and Japan want to increase innovation and secure technology leadership in this strategic field, their higher education (HE) and industry depend on well-educated experts who combine deep knowledge of semiconductor devices and advanced plasma-based manufacturing techniques.

A joint master programme

The Joint Master programme Plasma and Semiconductor Technologies for Future Chip Manufacturing (PS4C) is an English-taught programme that will educate a new generation of highly skilled scientists and engineers. It will provide a strong scientific foundation in plasma and semiconductor technologies, with a particular focus on micro- and nanofabrication for chips of the future (microelectronics, photonics, quantum, sensors, etc.), combining the complementary expertise of the partner institutions in plasma science, semiconductor science, materials and surface science, as well as adapted AI applications and digital-twin enabling technologies. The strong engagement of PS4C with industry (including world-leading companies such as ASML, Tokyo Electron TEL, TSMC) ensures that research and education are directly informed by market needs, facilitating innovation and faster technology transfer.